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Hung-Fei Kuo










Electro-Optical Systems Lab.(T1-205)


Prof. Kuo received the Ph.D. degree in electrical and computer engineering from Georgia Institute of Technology, Atlanta, GA in 2004. From 2005 to 2006, he served as an optical department manager at GCC, Taiwan. From 2007 to 2009, he was an application development engineer at ACE in ASML. Since 2010, he joined the faculty of the Graduate Institute of Automation and Control, National Taiwan University of Science and Technology, Taipei, R.O.C.. His research interests include the development of next generation lithography techniques and optical system integrations.


Hung-Fei Kuo and Chun-Chao Chang, "Analysis of Core-Shell-Isolated Nanoparticle Configurations Used in the Surface-Enhanced Raman Scattering Technique," IEEE Sensors J., Accepted, June 2014.

Hung-Fei Kuo, "Effect of Source Pupil Shape on Process Windows in EUV Lithography," IEEE Trans. Nanotechnol. vol.13, no.1, pp. 136-142, Jan. 2014.

Hung-Fei Kuo and Frederick, ”Gaussian Beam Incident on One-Dimensional Diffraction Gratings with High-K Metal Gate Stacks,” J. Nanosci. Nanotechnol. 14, 2780-2785, 2014.

Hung-Fei Kuo and Frederick, “Full Field Analysis of Critical Dimension Uniformity Due to Focal Variation for Contact Features in EUV Lithography,” J. Nanosci. Nanotechnol. 14, 2630- 2634, 2014.

Hung-Fei Kuo, Yu-Ting Chen, Ying-You Chen, and Frederick, “Impact of Hard Mask on Reflectivity for Litho-Etch-Litho-Etch Process in Double Patterning Lithography,” J. Comput.Theor. Nanosci. 10, 616-619, 2013.



Y. H. Yang and Hung-Fei Kuo, “Quantum Cascaded Laser at Wavelength 10µm for Laser Engraver in XY Table,” Taiwan patent no. M313029, issued June 2007; Austria patent no. 9630, issued Feburary 2007.

M. Chang and Hung-Fei Kuo, “Laser Marking Machine with Multiple Scanheads,” Germany patent no. 202007000175.4, issued February 2007; Japan patent no. 3129877, issued Feburary 2007; Taiwan patent no. M313067, issued June 2007.

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